Potential of silicon nanowires structures as nanoscale piezoresistors in mechanical sensors
نویسندگان
چکیده
منابع مشابه
Mechanical Properties of Silicon Nanowires
Nanowires have been taken much attention as a nanoscale building block, which can perform the excellent mechanical function as an electromechanical device. Here, we have performed atomic force microscope (AFM)-based nanoindentation experiments of silicon nanowires in order to investigate the mechanical properties of silicon nanowires. It is shown that stiffness of nanowires is well described by...
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ژورنال
عنوان ژورنال: IOP Conference Series: Materials Science and Engineering
سال: 2012
ISSN: 1757-899X
DOI: 10.1088/1757-899x/40/1/012038